Free-field Calibration of the Pressure Sensitivity of Microphones at Frequencies up to 80 kHz

A free-field (FF) substitution method for calibrating the pressure sensitivity of microphones at frequencies up to 80 kHz is demonstrated with both grazing and normal incidence geometries. The substitution-based method, as opposed to a simultaneous method, avoids problems associated with the non-uniformity of the sound field and, as applied here, uses a 1/2 -inch air-condenser pressure microphone as a known reference. Best results were obtained with a centrifugal fan, which is used as a random, broadband sound source. A broadband source minimizes reflection-related interferences that often plague FF measurements. Calibrations were performed on 1/4-inch FF air-condenser, electret, and micro-electromechanical systems (MEMS) microphones in an anechoic chamber. The accuracy of this FF method is estimated by comparing the pressure sensitivity of an air-condenser microphone, as derived from the FF measurement, with that of an electrostatic actuator calibration and is typically 0.3 dB (95% confidence), over the range 2-80 kHz.