Kinematical and mechanical aspects of wafer slicing

Some recently achieved results concerning the technological fundamentals of slurry sawing are presented. The specific material removal process and the related kinematic and geometric contact conditions between workpiece and saw blade are described. The result of a functional description of the slurry sawing process is presented, expressing the main process criteria, such as infeed per stroke, specific removal rate, specific tool wear, and vertical stroke intensity, in terms of the dominating process parameters, such as stroke length, width of workpiece, stroke frequency, specific cutting force and slurry specification.