Silicon production in an aerosol reactor

An aerosol reactor for the growth of large silicon particles by silane pyrolysis was shown to demonstrate the following properties: (1) generate seed particles by pyrolysis of a small amount of silane; (2) mix seed aerosol with primary silane flow, limiting number concentration such that the amount of silane is sufficient to grow the desired size of particles from the seed; and (3) react the silane at a rate which is controlled such that the seed particles scavenge the condensible vapors rapidly enough to inhibit further nucleation.