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JPL in-house fluidized bed reactor researchThe progress in the in-house program on the silane fluidized-bed system is reported. A seed-particle cleaning procedure was developed to obtain material purity near the level required to produce a semiconductor-grade product. The liner-seal design was consistently proven to withstand heating/cooling cycles in all of the experimental runs.
Document ID
19860019894
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Rohatgi, N. K. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 12, 2013
Publication Date
June 1, 1985
Publication Information
Publication: Proceedings of the 25th Project Integration Meeting
Subject Category
Energy Production And Conversion
Accession Number
86N29366
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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IDRelationTitle19860019875Collected WorksProceedings of the 25th Project Integration Meeting
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