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Sub micron area Nb/AlO(x)/Nb tunnel junctions for submillimeter mixer applicationsIn this paper, we report on a fabrication process developed for submicron area tunnel junctions. We have fabricated Nb/AlO(x)/Nb tunnel junctions with areas down to 0.1 sq micron using these techniques. The devices have shown excellent performance in receiver systems up to 500 GHz and are currently in use in radio astronomy observatories at 115, 230, and 500 GHz.
Document ID
19930018572
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Leduc, Henry G.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Bumble, B.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Cypher, S. R.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Judas, A. J.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Stern, J. A.
(Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
September 6, 2013
Publication Date
January 1, 1992
Publication Information
Publication: Michigan Univ., The Third International Symposium on Space Terahertz Technology: Symposium Proceedings
Subject Category
Electronics And Electrical Engineering
Accession Number
93N27761
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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