Scattering from binary optics

There are a number of sources of scattering in binary optics: etch depth errors, line edge errors, quantization errors, roughness, and the binary approximation to the ideal surface. These sources of scattering can be systematic (deterministic) or random. In this paper, scattering formulas for both systematic and random errors are derived using Fourier optics. These formulas can be used to explain the results of scattering measurements and computer simulations.