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Improved Controller for a Three-Axis Piezoelectric StageAn improved closed-loop controller has been built for a three-axis piezoelectric positioning stage. The stage can be any of a number of commercially available or custom-made units that are used for precise three-axis positioning of optics in astronomical instruments and could be used for precise positioning in diverse fields of endeavor that include adaptive optics, fabrication of semiconductors, and nanotechnology.
Document ID
20090032109
Acquisition Source
Jet Propulsion Laboratory
Document Type
Other - NASA Tech Brief
Authors
Rao, Shanti
(California Inst. of Tech. Pasadena, CA, United States)
Palmer, Dean
(California Inst. of Tech. Pasadena, CA, United States)
Date Acquired
August 24, 2013
Publication Date
September 1, 2009
Publication Information
Publication: NASA Tech Briefs, September 2009
Subject Category
Engineering (General)
Report/Patent Number
NPO-44806
Distribution Limits
Public
Copyright
Public Use Permitted.
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