Measuring Cyclic Error in Laser Heterodyne Interferometers

An improved method and apparatus have been devised for measuring cyclic errors in the readouts of laser heterodyne interferometers that are configured and operated as displacement gauges. The cyclic errors arise as a consequence of mixing of spurious optical and electrical signals in beam launchers that are subsystems of such interferometers. The conventional approach to measurement of cyclic error involves phase measurements and yields values precise to within about 10 pm over air optical paths at laser wavelengths in the visible and near infrared. The present approach, which involves amplitude measurements instead of phase measurements, yields values precise to about .0.1 microns . about 100 times the precision of the conventional approach. In a displacement gauge of the type of interest here, the laser heterodyne interferometer is used to measure any change in distance along an optical axis between two corner-cube retroreflectors. One of the corner-cube retroreflectors is mounted on a piezoelectric transducer (see figure), which is used to introduce a low-frequency periodic displacement that can be measured by the gauges. The transducer is excited at a frequency of 9 Hz by a triangular waveform to generate a 9-Hz triangular-wave displacement having an amplitude of 25 microns. The displacement gives rise to both amplitude and phase modulation of the heterodyne signals in the gauges. The modulation includes cyclic error components, and the magnitude of the cyclic-error component of the phase modulation is what one needs to measure in order to determine the magnitude of the cyclic displacement error. The precision attainable in the conventional (phase measurement) approach to measuring cyclic error is limited because the phase measurements are af-