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A large granite stage and measuring microscope.A stage and measuring microscope servocontrolled by a computer have been constructed. The travel of the stage is 0.5 x 0.5 m and the travel of the microscope objective is 7.5 cm. The measuring accuracy is 1 micron in the x-y plane and 5 microns along the z axis. The mechanical and optical construction of the stage and microscope, as well as the way in which the control electronics are organized, permit great flexibility of operation. Possible applications include the scanning and measuring of astronomical plates, the laying out of patterns of semiconductor devices of very large sizes, and the measurement of precision grids.
Document ID
19720031811
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Alston-Garnjost, M.
Davis, J. W.
Dauber, P. M.
Smits, R. G.
(California, University Berkeley, Calif., United States)
Date Acquired
August 6, 2013
Publication Date
November 1, 1971
Publication Information
Publication: Review of Scientific Instruments
Volume: 42
Subject Category
Instrumentation And Photography
Accession Number
72A15477
Distribution Limits
Public
Copyright
Other

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