Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Wightman, J. P. (Virginia Polytechnic Institute and State University Blacksburg, Va., United States) Date Acquired
August 6, 2013
Publication Date
December 1, 1971
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 8
Accession Number
72A16395
Funding Number(s)
CONTRACT_GRANT: NGR-47-004-016
Distribution Limits
Public