An X-ray monitor for measurement of a titanium tritide target thickness.

An X-ray device capable of measuring titanium tritide film thickness from 0.1 to 30 microns has been built and tested. The monitor was designed for use in a rotating target system which used thick targets and incorporated a sputtering electrode to remove depleted layers from the target surface. The thickness measurement can be done in the presence of an intense background of bremsstrahlung and characteristic titanium X-radiation. A measurement can be accomplished in situ in two hours with reasonable accuracy.