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Electron-beam studies of Schottky-barrier detector surfacesReview of the surface anomalies occurring in Schottky-barrier particle detectors identifiable by means of an electron beam technique employed by Czaja (1965) for analyzing defects in diode structures. The technique is shown to make possible the detection and identification of the following anomalies: (1) chemical contamination of the detector surface; (2) mechanical damage of the wafer substrates; (3) damage introduced in semiconductor surface preparation; (4) radiation damage; and (5) defective surface metallization.
Document ID
19740037497
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Peckerar, M. C.
(NASA Goddard Space Flight Center Greenbelt, Md., United States)
Date Acquired
August 7, 2013
Publication Date
December 1, 1973
Subject Category
Physics, Solid-State
Accession Number
74A20247
Distribution Limits
Public
Copyright
Other

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