Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hudson, J. B. (Rensselaer Polytechnic Institute, Troy, N.Y., United States) Date Acquired
August 8, 2013
Publication Date
April 1, 1975
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 12
Subject Category
Inorganic And Physical Chemistry Accession Number
75A28069
Funding Number(s)
CONTRACT_GRANT: NGR-33-018-066
Distribution Limits
Public