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Polyimide thin-film dielectrics on ferroelectricsConducting layers of multi-layered thin-film ferroelectric device, such as is used in liquid crystal/ferroelectric display, can be electrically isolated using thin-film layer of polyimide. Ease of application and high electrical-breakdown strength allow dependable and economical means of providing dielectric for other thin-film microelectronic devices.
Document ID
19770000239
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Galiardi, R. V. (Rockwell Intern. Corp.)
Date Acquired
August 8, 2013
Publication Date
September 1, 1977
Publication Information
Publication: NASA Tech Briefs
Volume: 2
Issue: 2
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
LAR-11996
Accession Number
77B10239
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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