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Physical properties of thin-film field emission cathodes with molybdenum conesField emission cathodes fabricated using thin-film techniques and electron beam microlithography are described, together with effects obtained by varying the fabrication parameters. The emission originates from the tip of molybdenum cones that are about 1.5 micron tall with a tip radius around 500 A. Such cathodes have been produced in closely packed arrays containing 100 and 5000 cones as well as singly. Maximum currents in the range 50-150 microamp per cone can be drawn. Life tests with the 100-cone arrays drawing 2 mA total emission (or 3 A per sq cm) have proceeded in excess of 7000 hr with about a 10% drop in emission current. Studies are presented of the emission characteristics and current fluctuation phenomena. It is tentatively concluded that the emission arises from only one or a few atomic sites on the cone tips.
Document ID
19770033755
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Spindt, C. A.
(Stanford Research Inst. Menlo Park, CA, United States)
Brodie, I.
(Stanford Research Inst. Menlo Park, CA, United States)
Humphrey, L.
(Stanford Research Inst. Menlo Park, CA, United States)
Westerberg, E. R.
(Stanford Research Institute Menlo Park, Calif., United States)
Date Acquired
August 9, 2013
Publication Date
December 1, 1976
Publication Information
Publication: Journal of Applied Physics
Volume: 47
Subject Category
Electronics And Electrical Engineering
Accession Number
77A16607
Funding Number(s)
CONTRACT_GRANT: DAHC04-73-C-0007
CONTRACT_GRANT: NAS3-18903
Distribution Limits
Public
Copyright
Other

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