Silicon solar cells by ion implantation and pulsed energy processingA new method for fabrication of silicon solar cells is being developed around ion implantation in conjunction with pulsed electron beam techniques to replace conventional furnace processing. Solar cells can be fabricated totally in a vacuum environment at room temperature. Cells with 10% AM0 efficiency have been demonstrated. High efficiency cells and effective automated processing capabilities are anticipated.
Document ID
19780027037
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Authors
Kirkpatrick, A. R. (Simulation Physics, Inc. Bedford, MA, United States)
Minnucci, J. A. (Simulation Physics, Inc. Bedford, MA, United States)
Shaughnessy, T. S. (Simulation Physics, Inc. Bedford, MA, United States)
Greenwald, A. C. (Simulation Physics, Inc. Bedford, Mass., United States)