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Automatic inspection of silicon wafersLaser machine scans wafers for contaminating particles which cause open circuits, short circuits, and other defects in integrated circuits and transfers good wafers to integrated circuit processing equipment. Machine is faster and more accurate than human operator using lightfield/dark field microscope.
Document ID
19790000384
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Martin, M.
(TAI, Inc.)
Date Acquired
August 10, 2013
Publication Date
April 1, 1980
Publication Information
Publication: NASA Tech Briefs
Volume: 4
Issue: 3
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
MFS-25124
Accession Number
79B10384
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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