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Adjusting an electron beam for drillingReticle contains two concentric circles: inner circle insures beam circularity and outer circle is guide to prevent beam from cutting workpiece clamp. Precise measurement of beam and clamp are required with old reticle. New reticle speeds up electron-beam drilling process by eliminating need to rotate eyepiece to make measurements against reticle scale.
Document ID
19790000572
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Childress, C. L. (Rockwell Intern. Corp.)
Date Acquired
August 10, 2013
Publication Date
June 1, 1980
Publication Information
Publication: NASA Tech Briefs
Volume: 4
Issue: 4
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
MFS-19326
Accession Number
79B10572
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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