Investigation into the effect of plasma pretreatment on the adhesion of parylene to various substrates

An experimental effort has been undertaken to examine the effect of plasma pretreatment of various substrate materials coated with a polymer in the parylene family. This report describes the procedure and discusses initial data which indicate using plasmas of argon and oxygen to promote adhesion of parylene coatings upon many difficult-to-bond substrates. Substrates investigated were gold, nickel, kovar, teflon (FEP), kapton, silicon, tantalum, titanium, and tungsten. Without plasma treatment, 180 deg peel tests yield a few g/cm (oz/in) strengths. With dc plasma treatment in the deposition chamber, followed by coating, peel strengths are increased by one to two orders of magnitude.