Tribological properties of sputtered MoS2 films in relation to film morphology

Thin sputter-deposited MoS2 films with thicknesses ranging from 2000 to 6000 A have shown excellent lubricating properties when sputtering parameters and substrate conditions are properly selected and controlled. The lubricating properties are strongly influenced by the crystalline-amorphous structure, morphology, and composition of the films. The coefficient of friction can range from 0.04 (which is effective lubrication) to 0.4 (no lubricating action).