Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Halicioglu, T. (NASA Ames Research Center Moffett Field; Polyatomics Research, Inc., Mountain View, Calif., United States) White, P. J. (NASA Ames Research Center Moffett Field, Calif., United States) Date Acquired
August 10, 2013
Publication Date
October 1, 1980
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 17
Subject Category
Atomic And Molecular Physics Accession Number
80A49383
Funding Number(s)
CONTRACT_GRANT: NAS2-1069
Distribution Limits
Public