Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Kendall, B. R. F. (Pennsylvania State University University Park, Pa., United States) Date Acquired
August 11, 2013
Publication Date
December 1, 1980
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 17
Accession Number
81A15748
Distribution Limits
Public