Fundamental design problems and properties of microwave plasma/ion sources

Design problems and procedures associated with microwave plasma sources are applied to cylindrical plasmas inside coaxial and cylindrical cavities. The experimental performance of these cavities is presented. Measurements of electron density and electron temperature for several inert gases, and different tube diameters and pressures are presented and compared with microwave and positive column discharge theories. Results show that plasmas with electron densities in excess of 10 to the 12th/cu cm are easily produced from microwave S band energy. The potential for these sources for ion engines is evaluated.