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Ion plating for the futureThe ion plating techniques are classified relative to the instrumental set up, evaporation media and mode of transport. Distinction is drawn between the low vacuum (plasma) and high vacuum (ion beam) techniques. Ion plating technology is discussed at the fundamental and industrial level. At the fundamental level, the capabilities and limitations of the plasma (evaporant flux) and film characteristics are evaluated. On the industrial level, the performance and potential uses of ion plated films are discussed.
Document ID
19810060250
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Spalvins, T.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 11, 2013
Publication Date
May 1, 1981
Subject Category
Mechanical Engineering
Meeting Information
Meeting: Annual Technical Conference
Location: Dearborn, MI
Start Date: May 12, 1981
End Date: May 14, 1981
Sponsors: Society of Vacuum Coaters
Accession Number
81A44654
Distribution Limits
Public
Copyright
Other

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