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Long-Life/Low-Power Ion-Gun CathodeNew cathode has form of hollow tube through which gas enters region of high electron density, produced by electric discharge with auxiliary electrode referred to as "keeper." Ion-gun cathode emits electrons that bombard gas in chamber. Ions accelerated out of source are used to dope semiconductor material.
Document ID
19820000002
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Fitzgerald, D. J.
(CALTECH)
Date Acquired
August 10, 2013
Publication Date
December 1, 1982
Publication Information
Publication: NASA Tech Briefs
Volume: 6
Issue: 4
ISSN: 0145-319X
Subject Category
Electronic Components And Circuits
Report/Patent Number
NPO-15328
Accession Number
82B10002
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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