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Eliminating Impurity Traps in the Silane ProcessRedistribution reaction section of silane process progressively separates heavier parts of chlorosilane feedstock until light silane product is available for pyrolysis. Small amount of liquid containing impurities is withdrawn from processing stages in which trapping occurs and passed to earlier processing stage in which impurities tend to be removed via chemical reactions.
Document ID
19820000026
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Coleman, L. M.
(Union Carbide Corp.)
Date Acquired
August 10, 2013
Publication Date
December 1, 1982
Publication Information
Publication: NASA Tech Briefs
Volume: 6
Issue: 4
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-15217
Accession Number
82B10026
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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