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Water-Vapor Sample Holder for Mass SpectrometersWater-vapor sample holder for mass spectrometer contains water vapor for calibration. It is sealed by aluminum disk. Calibration sample and integrated circuit modules are tested sequentially in same manner.
Document ID
19820000052
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Haack, R. F. (CALTECH)
Reilly, W. W. (CALTECH)
Date Acquired
August 10, 2013
Publication Date
December 1, 1982
Publication Information
Publication: NASA Tech Briefs
Volume: 6
Issue: 4
ISSN: 0145-319X
Subject Category
Mechanics
Report/Patent Number
NPO-15007
Accession Number
82B10052
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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