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Closed-Loop Process Yields Ultrapure SiliconMetallurgical-grade silicon transforms into tribromosilane by reacting it with process byproducts. Tribromosilane is separated from mixture, purified, and finally decomposed in presence of hydrogen in silicon-product reactor. Conversion efficiencies of 30 to greater than 60 percent of tribromosilane to ultrapure granular polycrystalline silicon are typical in produce reactor.
Document ID
19820000155
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Schumacher, J. C.
(J. C. Schumacher Co.)
Moore, E. B.
(J. C. Schumacher Co.)
Date Acquired
August 10, 2013
Publication Date
March 1, 1982
Publication Information
Publication: NASA Tech Briefs
Volume: 7
Issue: 1
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-15283
Accession Number
82B10155
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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