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Industry needs for silicon crystals and standardsThe trend of the device fabrication industry requirement for larger crystals is reviewed. The ranges of properties and uniformities measurement standards needed for resistivity (four-point probe and spreading resistance) and for the chemical composition of oxygen and carbon impurities are presented.
Document ID
19820018464
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Benson, K. E. (Bell Telephone Labs., Inc. Allentown, PA, United States)
Date Acquired
August 10, 2013
Publication Date
September 1, 1981
Publication Information
Publication: NASA. Marshall Space Flight Center Float Zone Workshop
Subject Category
Astronautics (General)
Accession Number
82N26340
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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