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Role of substrate quality on IC performance and yieldsThe development of silicon and gallium arsenide crystal growth for the production of large diameter substrates are discussed. Large area substrates of significantly improved compositional purity, dopant distribution and structural perfection on a microscopic as well as macroscopic scale are important requirements. The exploratory use of magnetic fields to suppress convection effects in Czochralski crystal growth is addressed. The growth of large crystals in space appears impractical at present however the efforts to improve substrate quality could benefit from the experiences gained in smaller scale growth experiments conducted in the zero gravity environment of space.
Document ID
19820018465
Acquisition Source
Legacy CDMS
Document Type
Conference Paper
Authors
Thomas, R. N.
(Westinghouse Electric Corp. Pittsburgh, PA, United States)
Date Acquired
August 10, 2013
Publication Date
September 1, 1981
Publication Information
Publication: NASA. Marshall Space Flight Center Float Zone Workshop
Subject Category
Astronautics (General)
Accession Number
82N26341
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.
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