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Surface diffusion activation energy determination using ion beam microtexturingThe activation energy for impurity atom (adatom) surface diffusion can be determined from the temperature dependence of the spacing of sputter cones. These cones are formed on the surface during sputtering while simultaneously adding impurities. The impurities form clusters by means of surface diffusion, and these clusters in turn initiate cone formation. Values are given for the surface diffusion activation energies for various materials on polycrystalline Cu, Al, Pb, Au, and Ni. The values for different impurity species on each of these substrates are approximately independent of impurity species within the experimental uncertainty, suggesting the absence of strong chemical bonding effects on the diffusion.
Document ID
19820038430
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Rossnagel, S. M.
(Colorado State Univ. Fort Collins, CO, United States)
Robinson, R. S.
(Colorado State University Fort Collins, CO, United States)
Date Acquired
August 10, 2013
Publication Date
February 1, 1982
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 20
Subject Category
Solid-State Physics
Accession Number
82A21965
Funding Number(s)
CONTRACT_GRANT: NAG3-43
Distribution Limits
Public
Copyright
Other

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