Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Pepper, S. V. (NASA Lewis Research Center Cleveland, OH, United States) Date Acquired
August 10, 2013
Publication Date
February 1, 1982
Publication Information
Publication: Journal of Vacuum Science and Technology
Volume: 20
Accession Number
82A32401
Distribution Limits
Public