Relatively low-temperature pyrolysis of silane in free space

The continuous flow pyrolyzer is a free space reactor that is used to study the effects of concentration, flow rate and temperature in making solar-grade silicon by pyrolysis of silane gas. Work with the continuous flow pyrolyzer is within the DOE-sponsored Low-Cost Solar Array Project. The work has led to a new theoretical treatment of silane pyrolysis in free space at relatively low temperatures (550 C to 750 C). It involves a sequential, three-step mechanism of particle growth: first, silicon atom generation by homogeneous reaction; second, coagulation to a 0.1 micron particle due to Brownian motion and van der Waals forces; and finally, chemical vapor deposition by heterogeneous reaction to final particle size.