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Heterogeneous decomposition of silane in a fixed bed reactorHeterogeneous decomposition of silane in a fluidized bed offers an attractive route for the low-cost production of silicon for photovoltaic application. To obtain design data for a fluid bed silane pyrolysis reactor, deposition experiments were conducted in a small-scale fixed bed apparatus. Data on the decomposition mode, plating rate, and deposition morphology were obtained in the temperature range 600 900 C. Conditions favorable for heterogenous decomposition with good deposition morphology were identified. The kinetic rate data showed the reaction to be first order with an activation energy of 38.8 kcal/mole, which agrees well with work done by others. The results are promising for the development of an economically attractive fluid bed process.
Document ID
19820050546
Acquisition Source
Legacy CDMS
Document Type
Conference Proceedings
Authors
Iya, S. K.
(Union Carbide Corp. Tonawanda, NY, United States)
Flagella, R. N.
(Union Carbide Corp. Tonawanda, NY, United States)
Dipaolo, F. S.
(Union Carbide Corp. Linde Div., Tonawanda, NY, United States)
Date Acquired
August 10, 2013
Publication Date
January 1, 1981
Subject Category
Chemistry And Materials (General)
Meeting Information
Meeting: Symposium on Materials and New Processing Technologies for Photovoltaics
Location: Hollywood, FL
Start Date: October 1, 1980
Accession Number
82A34081
Distribution Limits
Public
Copyright
Other

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