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Melt-Level Sensing in Silicon-Web GroowthLaser beam reflected from silicon-melt surface onto position detector to monitor melt level during web growth. Silicon web production increased by synchronizing silicon melt replenishment with web growth rate.
Document ID
19830000473
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Duncan, C. S. (Westinghouse Electric Corp.)
Skutch, M. E. (Westinghouse Electric Corp.)
Steinbruegge, K. B. (Westinghouse Electric Corp.)
Date Acquired
August 11, 2013
Publication Date
April 1, 1984
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 1
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-15356
Accession Number
83B10473
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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