NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Back to Results
Upgrading Metallurgical-Grade SiliconClosed-loop process produces semiconductor-grade silicon. Metallurgical-grade silicon converted to ultrapure silicon by reacting with hydrogen and silicon tetrahalide to form trihalosilane, purifying this intermediate and again decomposing to high purity silicon in third stage. Heterogeneously and homogeneously nucleated polycrystalline silicon used in semiconductor device applications and in silicon photovoltaic solar cell fabrication.
Document ID
19840000074
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Woerner, L. M.
(J.C. Schumacher Co.)
Moore, E. B.
(J.C. Schumacher Co.)
Date Acquired
August 12, 2013
Publication Date
January 1, 1985
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 3
ISSN: 0145-319X
Subject Category
Materials
Report/Patent Number
NPO-15076
Accession Number
84B10074
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Available Downloads

There are no available downloads for this record.
No Preview Available