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Reciprocating Saw for Silicon WafersConcept increases productivity and wafer quality. Cutting wafers from silicon ingots produces smooth wafers at high rates with reduced blade wear. Involves straight reciprocating saw blade and slight rotation of ingot between cutting strokes. Many parallel blades combined to cut many wafers simultaneously from ingot.
Document ID
19840000171
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Morrison, A. D.
(CALTECH)
Collins, E. R., Jr.
(CALTECH)
Date Acquired
August 12, 2013
Publication Date
January 1, 1985
Publication Information
Publication: NASA Tech Briefs
Volume: 8
Issue: 3
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-15863
Accession Number
84B10171
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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