Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Welch, D. F. (Cornell Univ. Ithaca, NY, United States) Wicks, G. W. (Cornell Univ. Ithaca, NY, United States) Woodard, D. W. (Cornell Univ. Ithaca, NY, United States) Eastman, L. F. (Cornell University Ithaca, NY, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1983
Publication Information
Publication: Journal of Vacuum Science and Technology B
Volume: 1
ISSN: 0734-211X
Subject Category
Electronics And Electrical Engineering Accession Number
84A21650
Distribution Limits
Public