Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Richards, D. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) El-Korashy, A. M. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Stirn, R. J. (California Institute of Technology, Jet Propulsion Laboratory, Pasadena CA, United States) Karulkar, P. C. (Rockwell International Corp. Anaheim, CA, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 2
ISSN: 0734-2101
Accession Number
84A37560
Distribution Limits
Public