Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Duke, C. B. (Princeton Univ. NJ, United States) Paton, A. (Xerox Webster Research Center Webster, NY, United States) Kahn, A. (Princeton University Princeton, NJ, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 2
ISSN: 0734-2101
Accession Number
84A37575
Funding Number(s)
CONTRACT_GRANT: NSF DMR-82-05132
CONTRACT_GRANT: JPL-956338
Distribution Limits
Public