Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Hecht, M. H. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Grunthaner, F. J. (California Institute of Technology, Jet Propulsion Laboratory, Pasadena CA, United States) Pianetta, P. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Johansson, L. I. (Jet Propulsion Lab., California Inst. of Tech. Pasadena, CA, United States) Lindau, I. (Stanford University Stanford, CA, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 2
ISSN: 0734-2101
Accession Number
84A37585
Distribution Limits
Public