Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Bagus, P. S. (IBM Research Laboratory San Jose, CA, United States) Nelin, C. J. (Analatom, Inc. Sunnyvale, CA, United States) Bauschlicher, C. W., Jr. (NASA Ames Research Center Moffett Field, CA, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1984
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 2
ISSN: 0734-2101
Subject Category
Inorganic And Physical Chemistry Accession Number
84A37593
Distribution Limits
Public