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'Diamondlike' carbon films - Optical absorption, dielectric properties, and hardness dependence on deposition parametersAn RF plasma deposition system was used to prepare amorphous 'diamondlike' carbon films. The source gases for the RF system include methane, ethylene, propane, and propylene, and the parameters varied were power, dc substrate bias, and postdeposition anneal temperature. Films were deposited on various substrates. The main diagnostics were optical absorption in the visible and in the infrared, admittance as a function of frequency, hardness, and Auger and ESCA spectroscopy. Band gap is found to depend strongly on RF power level and band gaps up to 2.7 eV and hardness up to 7 Mohs were found. There appears to be an inverse relationship between hardness and optical band gap.
Document ID
19850058232
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
Authors
Natarajan, V.
(Nebraska Univ. Lincoln, NE, United States)
Lamb, J. D.
(Nebraska Univ. Lincoln, NE, United States)
Woollam, J. A.
(Nebraska, University Lincoln, United States)
Liu, D. C.
(Nebraska Univ. Lincoln, NE, United States)
Gulino, D. A.
(NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 12, 2013
Publication Date
June 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 3
ISSN: 0734-2101
Subject Category
Nonmetallic Materials
Accession Number
85A40383
Funding Number(s)
CONTRACT_GRANT: NAG3-95
CONTRACT_GRANT: NAG3-154
Distribution Limits
Public
Copyright
Other

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