Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Warner, J. D. (NASA Lewis Research Center Cleveland, OH, United States) Pouch, J. J. (NASA Lewis Research Center Cleveland, OH, United States) Alterovitz, S. A. (NASA Lewis Research Center Cleveland, OH, United States) Liu, D. C. (NASA Lewis Research Center Cleveland, OH, United States) Lanford, W. A. (New York, State University Albany, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 3
ISSN: 0734-2101
Accession Number
85A40386
Distribution Limits
Public