Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Valco, G. J. (Cincinnati Univ. OH, United States) Kapoor, V. J. (Cincinnati, University OH, United States) Date Acquired
August 12, 2013
Publication Date
June 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 3
ISSN: 0734-2101
Accession Number
85A40387
Distribution Limits
Public