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Xenon-Ion Drilling of Tungsten FilmsHigh-velocity xenon ions used to drill holes of controlled size and distribution through tungsten layer that sheaths surface of controlled-porosity dispenser cathode of traveling wave-tube electron emitter. Controlled-porosity dispenser cathode employs barium/calcium/ aluminum oxide mixture that migrates through pores in cathode surface, thus coating it and reducing its work function. Rapid, precise drilling technique applied to films of other metals and used in other applications where micron-scale holes required. Method requires only few hours, as opposed to tens of hours by prior methods.
Document ID
19860000300
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Garner, C. E.
(Caltech)
Date Acquired
August 12, 2013
Publication Date
May 1, 1986
Publication Information
Publication: NASA Tech Briefs
Volume: 10
Issue: 3
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
NPO-16626
Accession Number
86B10300
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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