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Laser Vacuum Furnace for Zone RefiningLaser beam scanned to produce moving melt zone. Experimental laser vacuum furnace scans crystalline wafer with high-power CO2-laser beam to generate precise melt zone with precise control of temperature gradients around zone. Intended for zone refining of silicon or other semiconductors in low gravity, apparatus used in normal gravity.
Document ID
19860000519
Acquisition Source
Legacy CDMS
Document Type
Other - NASA Tech Brief
Authors
Griner, D. B. (Penn-Penn Research Corp.)
Zurburg, F. W. (Penn-Penn Research Corp.)
Penn, W. M. (PennPenn Research Corp.)
Date Acquired
August 12, 2013
Publication Date
November 1, 1986
Publication Information
Publication: NASA Tech Briefs
Volume: 10
Issue: 6
ISSN: 0145-319X
Subject Category
Fabrication Technology
Report/Patent Number
MFS-26043
Accession Number
86B10519
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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