Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Kattelus, H. P. (California Inst. of Tech. Pasadena, CA, United States) Kolawa, E. (California Inst. of Tech. Pasadena, CA, United States) Affolter, K. (California Inst. of Tech. Pasadena, CA, United States) Nicolet, M.-A. (California Institute of Technology Pasadena, United States) Date Acquired
August 12, 2013
Publication Date
December 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 3
ISSN: 0734-2101
Accession Number
86A17476
Distribution Limits
Public