Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
Authors
Prakash, S. (California Univ. Los Angeles, CA, United States) Budhani, R. (California Univ. Los Angeles, CA, United States) Doerr, H. J. (California Univ. Los Angeles, CA, United States) Deshpandey, C. V. (California Univ. Los Angeles, CA, United States) Bunshah, R. F. (California, University Los Angeles, United States) Date Acquired
August 12, 2013
Publication Date
December 1, 1985
Publication Information
Publication: Journal of Vacuum Science and Technology A
Volume: 3
ISSN: 0734-2101
Accession Number
86A17495
Distribution Limits
Public