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Convenient mounting method for electrical measurements of thin samplesA method for mounting thin samples for electrical measurements is described. The technique is based on a vacuum chuck concept in which the vacuum chuck simultaneously holds the sample and established electrical contact. The mounting plate is composed of a glass-ceramic insulating material and the surfaces of the plate and vacuum chuck are polished. The operation of the vacuum chuck is examined. The contacts on the sample and mounting plate, which are sputter-deposited through metal masks, are analyzed. The mounting method was utilized for van der Pauw measurements.
Document ID
19860061911
Acquisition Source
Legacy CDMS
Document Type
Reprint (Version printed in journal)
External Source(s)
doi:10.1063/1.1138565
Authors
Matus, L. G. (NASA Lewis Research Center Cleveland, OH, United States)
Summers, R. L. (NASA Lewis Research Center Cleveland, OH, United States)
Date Acquired
August 12, 2013
Publication Date
July 1, 1986
Publication Information
Publication: Review of Scientific Instruments
Volume: 57
ISSN: 0034-6748
Subject Category
Electronics And Electrical Engineering
Accession Number
86A46649
Distribution Limits
Public
Copyright
Other

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